Fabrication and characterization of RF co-Sputtered Au-Ag alloy nanoparticles in SiO2 thin films

We have studied formation of Au-Ag alloy nanoparticles (NPs) in sputtered SiO2 thin films. Silica thin films containing Au-Ag NPs were deposited on quartz substrates using RF reactive magnetron co-sputtering technique. The films heat-treated in reducing Ar+H2 atmosphere at different temperatures. They were analyzed by using UV–visible spectrophotometry, atomic force microscopy and x-ray photoelectron spectroscopy (XPS) methods for their optical, surface morphological as well as structural and chemical properties

کلیدواژه ها:

Au-Ag alloy nanoparticles ، Reactive co-sputtering ، Optical property