Analysis and improvement of electro thermal microactuators

In this article we study the effect of a conductive layer on top surface of an electro thermal microactuator and compare with the dominant electro thermal microactuators. In this model for same displacement we need less electrical power so it reduces the maximum temperature of microactuator. This device can be more adaptive with electronic device or biological situation. The relation between power consumption and tip displacement is plotted to verify this issue and compared with C.C Lee, W. Hsu microactuator. The result shows decrease about 17% in maximum Temperature and 15% for Tip displacement. These microactuators are developed for gripping and positioning the micro part scale such as bio cell, MEMS devise and etc. An electro thermal structural analysis is done, using finite element simulation program, ANSYS (release 12) to investigate the efficiency of this actuators.

کلیدواژه ها:

Mems ، Micro Electrothermal Actuator ، Micro Gripper