Effect of Substrate Temperature on Roughness, Thickness and Optical Properties of ZnS Thin Films

ZnS thin films were deposited on Crown glass substrates by electron beam vapor deposition technique. Thickness, roughness and optical properties of the films were investigated as a function of the substrate temperatures. The grain size of the films deposited at 150°C was bigger as compared to the films at other temperatures. Temperature increment from 20°C to 150°C, resulted in RMS roughness increment from 1.1nm to 11.57nm. Ellipsometry analyses reveal higher temperature increases the thickness and roughness of the layers. Form these observations it is concluded that the refractive index of ZnS thin film was lower than those for bulk ZnS

کلیدواژه ها:

Spectroscopic Ellipsometry (SE) ، Atomic Force Microscopy (AFM) ، electron beam vapor deposition technique ، surface roughness