Gas Sensor Based on Silicon Nanotube MOSFET

In this paper, Silicon Nanotube MOSFET is proposed for gas sensing. In this sensor, the changes in workfunction of metal gate have been used for detection amount of gas. In this study, two structures based on Si- nanotube MOSFET are used for hydrogen sensor (p-CH Si-nanotube MOSFET with Palladium gate) and oxygen sensor (n-CH Si-nanotube MOSFET with Silver gate). It has been shown that the use of nanotubes instead of nanowires reduces power consumption and increase sensitivity. The simulation is performed using Silvaco- ATLAS software.

کلیدواژه ها:

Silicon Nanotube ، MOSFET ، gas sensor ، hydrogen sensor ، oxygen sensor