Finite element and pseudo-rigid-body analysis of a flexure-based XY microgripper

This paper describes the design procedure of a microgripper mechanism whish could deliver high precision manipulation of micro objects. A combination of two modeling techniques namely Pseudo Rigid Body Model (PRBM) and Finite Element Analysis (FEA) was implemented to establish a high performance microgripper. The mechanism adopts a flexure-based concept on its joints to address the inherent nonlinearities associated with the application of conventional rigid hinges. A low relative error about 5% between these two methods is derived but when the web thickness of hinge is reduced and the mechanism is approached to nonlinear region, thus relative error is about 21% and the PRBM is not suitable for dynamic analysis.

کلیدواژه ها:

Microgripper ، PRBM ، FEA ، MEMS1