Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress
محل انتشار: ماهنامه بین المللی مهندسی، دوره: 27، شماره: 1
سال انتشار: 1392
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 717
فایل این مقاله در 6 صفحه با فرمت PDF قابل دریافت می باشد
- صدور گواهی نمایه سازی
- من نویسنده این مقاله هستم
استخراج به نرم افزارهای پژوهشی:
شناسه ملی سند علمی:
JR_IJE-27-1_018
تاریخ نمایه سازی: 17 خرداد 1393
چکیده مقاله:
In this paper, we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work, the effect of residual stress is considered on deflection of diaphragm andcapacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematicexpression for central deflection of corrugated diaphragm and its relationship with residual stress. Then, the capacitance and sensitivity of sensor using corrugated diaphragm with residual stress are calculated under bias voltage and pressure. The analytical results are compared with simulation using aFinite Element Method (FEM). The results show that the new analytical model is very close with simulation results.
کلیدواژه ها:
نویسندگان
b Azizollah Ganji
Department of Electrical and Computer Engineering, Babol University of Technology, Babol, Iran
m Taybi
Department of Electrical and Computer Engineering, Babol University of Technology, Babol, Iran