Thermal Analysis of Electrostatic Micro Actuator

Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators, RF-MEMS. The amount of applied voltage to an electrostatic actuator has a direct impact on temperature distribution throughout the actuator, which affects the resonant frequency of the actuator. This paper aims to study the temperature distribution in a micro-cantilever at different applied voltages. Finite element method, ANSYS, was used as a simulation tool.

کلیدواژه ها:

Micro cantilever ، temperature ، Electrostatic ، Finite element