Design and Simulation of a Three-Phase Electrostatic Cylindrical Rotary Micromotor

Nowadays the electrostatic motor finds frequent use in micro-electro-mechanical systems (MEMS) where their drive voltages are below 100 volts. Using moving charged plates in capacitor motors are far easier to fabricate than coils and iron cores. This paper presents a novel design of a three-phase electrostatic rotary motor. It is shown that the angular velocity of the cylindrical type motor is almost 1.8 times greater in comparison with parallel plate type and as the voltage increases the enhancement of slope rate in the angular velocity of the cylindrical type is more tangible compared to the parallel plate type. The effect of changing the gap between rotor and stator on the angular velocity is also studied.

کلیدواژه ها:

Cylindrical capacitors ، Electrostatic ، Micro-motors ، MEMS