Study on Effects of Hydrocarbonic Gases on Growth of Carbon Nanotubes by TCVD

We investigated different hydrocarbonic gases such as Acetylene, Carbon Monoxide and Methane on synthesized of carbon nanotubes. Except hydrocarbonic gases, all the chemical vapor deposition (CVD) process parameters such as substrate, nano thin films of metal which was coated on substrate, flow rate of reactant gases, temperature, time and diluted gases are constant. Carbon nanotubes (CNTs) were synthesized on glass substrate coated with iron, aluminum and copper by thermal chemical vapor deposition using acetylene and hydrogen as the reaction gases in atmospheric pressure. The flow rate ratio of acetylene to hydrogen is 1/5. They were investigated by atomic force microscope (AFM), Scanning electron microscope (SEM) and Raman Spectroscopy.

کلیدواژه ها:

DC magnetron sputtering ، TCVD ، Nanotube ، Glass substrate