An Investingation of the factors affecting frequency response of comb-drives micro-actuator in MEMS single-axis gyroscope

In this article a comb-drives micro-actuator was modeled and designed to be used in a MEMS single-axis gyroscope. This piece is designed to work analytically in the 6 kHz frequency. The results of the frequency response from the analysis and simulation of convertor software shows that segment operating frequency was 6.03 kHz and it is wery close to the desired value. Resonant frequency of This piece was invariant against changes in voltage and attenuation but the displacement range decreases due to increasing attenuation. By increasing the Spring constant value to 2.1 folds, the frequency increases to 12.7 kHz. But with increasing mass resonant frequency and consequently the sensitivity the, therefore system stability will be improved

کلیدواژه ها:

Comb-drives micro-actuator ، resonant frequency ، sensitivity ، single-axis gyroscope