Ahmadian - professor, Center of Excellnece in Design, Robotics and Automation, School of Mechanical Engineering Sharif University of Tecgnology, Tehran, Iran
Paak - Ms.c student Center of Excellent in Design, Robotics and Automation, School of Mechanical Engineering Sharif University of Technology , Tehran, Iran

Micropumps are one of the gravest and versatile outcomes of EMMS technology which have vast applications in industries. In this paper different types of micropumps, their characteristic and usage in precise engineering are presented then a novel design of micropumps with peristaltic motion, actuated with annular piezoelectric cells is introduced and its high efficiency was observed. Behavior and working parameters of mechanical micropumps are also studied.

micropump، peristaltic، piezoelectric