M Shekarzadeh - Mechanical Engineering Group, Engineering Department,Islamic Azad University, Ahwaz, Iran University Teacher

In this article, the effect of interactive lateral stiffness and damping and the length of cantilever on the torsional vibration modes of an atomic force microscope (AFM)rectangular cantilever is studied. A clossed-form expression for the sensitivity of vibration modes is derived using the relationship between the resonant frequency and contact stiffness of cantilever and sample. Each mode has a different sensitivity to variations in surface stiffness. This sensitivity directly controls the image resolution. It is obtained an AFM cantilever is more sensitive when the contact stiffness is lower and the first mode is the most sensitive mode. Also increase length of the cantilever causes torsional vibration sensitivity of the cantilever in each mode, when the contact stiffness is low.

Atomic force microscope, AFM, Torsional vibration, Cantilever