Ahmad Reza Rahmati - Assistant ProfessorMechanical Engineering Department, Faculty of Engineering, University of Kashan, Kashan, Iran
Sina Niazi - Master Student

As the development of micro electromechanical systems (MEMS), the flow in micro devices have become an area that receives a significant attention. This paper is concerned with application of the Entropic Lattice Boltzmann Method (ELBM), a particle-based approach, to compute two-dimensional flows in micro-geometries. The using ELBM for micro flow simulation is a good idea because it is based on the Boltzmann equation which is valid for the whole range of the Knudsen numbers. In this work ELBM is applied to simulate gaseous flows in a micro cavity and a micro channel for different Knudsen numbers. The obtained numerical results show that ELBM can be used properly for simulation of micro flows at slip regimes

Entropic Lattice Boltzmann Method- Micro channel- Micro cavity