Study on the Dynamic Pull-in instability of a Clamped-Clamped Microbeam due to Electrostatic Actuation
عنوان مقاله: Study on the Dynamic Pull-in instability of a Clamped-Clamped Microbeam due to Electrostatic Actuation
شناسه ملی مقاله: ISME16_835
منتشر شده در شانزدهمین کنفرانس سالانه بین المللی مهندسی مکانیک در سال 1387
شناسه ملی مقاله: ISME16_835
منتشر شده در شانزدهمین کنفرانس سالانه بین المللی مهندسی مکانیک در سال 1387
مشخصات نویسندگان مقاله:
Mohmmad Reza Ghazavi - Assistant professor Tarbiat Modares University
Ghader Rezazadeh - Associate Professor Urmia University
Saber Azizi - M.Sc Mechanical Engineering Student Tarbiat Modares University
خلاصه مقاله:
Mohmmad Reza Ghazavi - Assistant professor Tarbiat Modares University
Ghader Rezazadeh - Associate Professor Urmia University
Saber Azizi - M.Sc Mechanical Engineering Student Tarbiat Modares University
In this paper, the mechanical behavior of a clamped-clamped microbeam, exposed to electrical potential difference between the micro beam and the substrate is statically and dynamically analyzed. The nonlinear electromechanical coupled integro- differential equation governing the problem has been derived using variational principle and solved using a computer code based on Finite element method. The problem has been solved for various values of initial gaps between the micro beam and the substrate. The results show that undamped dynamic pull-in voltage is approximately 90-92% static pull-in voltage, depended on the initial gap. To compare the achieved results with those of reported ones it is supposed that the damping effects are negligible
کلمات کلیدی: Microbeam; Pull-in voltage; MEMS, Electrostatic actuation; Instability; Finite Element Method
صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/41411/