Performance Analysis of AFSMC Control of AFM Microcantilever with Chaotic Motions

In this paper, the nonlinear dynamics and chaotic behaviour of AFM tip-sample dynamic system, being run in the non-contact mode (TM), were investigated by considering the effects of hydrodynamic loading and squeeze film damping. The microcantilever was modelled as a spring-mass-damping system and the interaction between the tip and the sample was described by the Lennard-Jones (LJ) potential .then a robust adaptive fuzzy control algorithm for control of this chaotic system have been used. The control approach encompasses a fuzzy system and a robust controller. The fuzzy system is designed to mimic an ideal controller, based on sliding-mode control. The robust controller is designed to compensate for the difference between the fuzzy controller and the ideal controller. The parameters of the fuzzy system, as well as uncertainty bound of the robust controller, are tuned adaptively. The results showes that either the controller has a remarkable success in controlling the chaotic behaviour of AFM microcantilever, the control system can detect the variations of the surface of the sample which perform as a external disturbance and show it in input control signal

کلیدواژه ها:

AFM ، Lennard-Jones ، AFSMC ، Microcantilever ، Robust control