Sensitivity analysis for multi-layered piezoelectric micropump

Micropumps are multilayer sensitive devices that transfer specific amount of liquid when they deflect transversely. Since this action usually done many times and periodically, the produced stress and strain in different layers play important roll on the life time of the pump. In this work all the input parameters that can be important on the amount of stress and strain, are considered and their effectiveness are investigated on mentioned parameters. After analysis is done via finite element software ANSYS, the results shows that the density, elasticity modules from passive layer and the diameter from bonding layer are the most important factors when the maximum displacement considered to be an objective, on the other hand the diameter of piezoelectric layer is the only and most important factor in produced stress.

کلیدواژه ها:

Micropump ، Composite membrane ، sensitivity analysis