α-Al2O3 Thin Films Preparation Via Sol-gel Spin Coating Method

The novelty of sol-gel spin coating method and the special properties that can be appeared through this method such as fine thin films, fast and economical way of approach, made this method one of the most potential way for using in various industries. In this research, we studied the preparation of thin films with micro and nano metric thicknesses via sol-gel spin coating method. The main materials used in this research, for the preparation of thin films, is the α-phase of Aluminium Oxide (α-Al2O3) in presence of organic solvent, Ethylene Glycol (EG), and Methanol. The carried out characterization methods are Xray diffraction method (XRD), scanning electron microscopy (SEM) and optical microscopy (OM).Results of characterization methods shown the successful preparation of thin films via sol-gel spin coating method

کلیدواژه ها:

sol-gel spin coating method ، α-Al2O3 ، Ethylene Glycol (EG) ، Methanol