Nano zone drift prediction for nano scale manufacturing with nano robots
محل انتشار: دهمین کنفرانس ملی مهندسی ساخت و تولید
سال انتشار: 1388
نوع سند: مقاله کنفرانسی
زبان: انگلیسی
مشاهده: 1,752
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شناسه ملی سند علمی:
ICME10_174
تاریخ نمایه سازی: 29 آبان 1388
چکیده مقاله:
In this paper, drift is described as remained error after hysteresis and creep compensation and could seriously affect the SPM's performance. However thermal drift is introduced as the major part of total drift in the literature, total drift has several origins such as temperature, heat generation in system components, humidity existence and chemical properties, and should be explained with an acceptable model. This paper is organized to solve this problem for nanoscale parts. Using this paper, a comprehensive model could be introduced that is effective, simple and mathematically traceable. Final conclusion shows that this paper is very useful for drift prediction.
کلیدواژه ها:
نویسندگان
S Sadeghzadeh
Ph.D. Student, Faculty of Mechanical Engineering, Iran University of Science and Technology
M.H Korayem
Professor, Faculty ofMechanical Engineering, Iran University of Science and Technology