Nano zone drift prediction for nano scale manufacturing with nano robots

سال انتشار: 1388
نوع سند: مقاله کنفرانسی
زبان: انگلیسی
مشاهده: 1,752

فایل این مقاله در 8 صفحه با فرمت PDF قابل دریافت می باشد

استخراج به نرم افزارهای پژوهشی:

لینک ثابت به این مقاله:

شناسه ملی سند علمی:

ICME10_174

تاریخ نمایه سازی: 29 آبان 1388

چکیده مقاله:

In this paper, drift is described as remained error after hysteresis and creep compensation and could seriously affect the SPM's performance. However thermal drift is introduced as the major part of total drift in the literature, total drift has several origins such as temperature, heat generation in system components, humidity existence and chemical properties, and should be explained with an acceptable model. This paper is organized to solve this problem for nanoscale parts. Using this paper, a comprehensive model could be introduced that is effective, simple and mathematically traceable. Final conclusion shows that this paper is very useful for drift prediction.

نویسندگان

S Sadeghzadeh

Ph.D. Student, Faculty of Mechanical Engineering, Iran University of Science and Technology

M.H Korayem

Professor, Faculty ofMechanical Engineering, Iran University of Science and Technology