DSMC Simulation of Gas Flow in 2D Nanoscale Channels

Micro- and nanoelectromechanical systems (MEMS/NEMS) are miniaturized devices with critical feature sizes ranging from 100 to a few micro- and nanometers [1]. The emergence of MEMS and NEMS as a key enabling technology has led to the development of an increasing number of micro- and nanofluidic systems. Potential applications are numerous and include miniaturized heat exchangers, pressure sensors, pumps, filters, etc [2]. Micro- and nanochannels are a basic element of MEMS and NEMS devices and they often operated in gaseous environments [3]. A thorough understanding of the thermal physics of such flows is important in the design, fabrication, and operation of MEMS and NEMS.In the area of NEMS, computational simulation tools are just beginning to emerge. While many NEMS devices can be modeled using MEMS physical theories or MEMS computational tools, a large class of NEMS devices demand new simulation capabilities because of the new physics encountered at the nanoscale. In addition, the breakdown of a continuum approximation for some NEMS devices poses new challenges. As a result, the development of quantum, atomistic, multiscale and continuum simulation tools based on advanced physical theories becomes critical [1].In this paper, the fluid flow and heat transfer characteristics of two-dimensional nanochannel flow are examined. Molecular dynamic equations are solved using the direct simulation Monte Carlo method