Study on the effect of spray deposition rate on physical properties of nano-structured ZnO:N transparent conducting films

N-doped zinc oxide thin films are synthesized at 450 °C on glass substrate by spary pyrolysis method withdifferent spray rates. The SEM images revealed the formation of nano-size grains during growth process. The XRDspectra show all grown samples have a polycrystalline nature with hexagonal phase. Also we found that the variationsin transmittance of the layers are consistent with the variations of mean crystallite size in the films. Finally it is foundthat the variations of direct optical band gap and sheet resistance of the samples are consistent with the variations of theband tail width in the band structure of the material.

کلیدواژه ها:

ZnO:N thin film ، nano-structure ، SEM ، XRD ، UV. Vis. spectra ، I-V characteristics