Study on the Dynamic Pull-in instability of a Clamped-Clamped Microbeam due to Electrostatic Actuation

In this paper, the mechanical behavior of a clamped-clamped microbeam, exposed to electrical potential difference between the micro beam and the substrate is statically and dynamically analyzed. The nonlinear electromechanical coupled integro- differential equation governing the problem has been derived using variational principle and solved using a computer code based on Finite element method. The problem has been solved for various values of initial gaps between the micro beam and the substrate. The results show that undamped dynamic pull-in voltage is approximately 90-92% static pull-in voltage, depended on the initial gap. To compare the achieved results with those of reported ones it is supposed that the damping effects are negligible

کلیدواژه ها:

Microbeam ، Pull-in voltage ، MEMS ، Electrostatic actuation ، Instability ، Finite Element Method