Free vibration of Polysilicon micro-plates with cut-outs

This article aims to study the natural frequency of polysilicon microplates with central cut-out because not only the existence of cut-outs in plates may be essential on the basis of their desired functionality but also the resonant frequency can be changed by cut-outs. In this study, the modified couple stress theory is combined with Kirchhoff thin plate hypothesis to incorporate size effect to classical plate theory. The RayleighRitz method is employed to derive discrete equations of motion which yields eigenvalue problem. In the ‘numerical results section, the effects of different boundary conditions and side-length to thickness ratio on dimensionless fundamental frequency of polysilicon micro-plates are studied.