Facile Replication of Nano and Micro Structures Using Soft Elastomeric Liquid Silicone Rubber (LSR)

The aim of this study was to explore a novel and facile cast molding method in order to replicate nano and micro structures on a new kind of liquid silicone rubber (LSR) of polydimethylsiloxane (PDMS) elastomeric material reinforce mended by filler. The used two-component PDMS was diluted by toluene and then was casted over a micro patterned Si master mold and then cured. The transferred pattern was characterized by SEM and AFM. Results showed cross-linked PDMS network can be successfully patterned in micro and nano scales from a Si master mold without the need for surface modification of mold at atmospheric pressure