Co-deposition of Pyrolytic Carbon-Silicon Carbide Composite from Trimethylsilyl Chloride Precursor: Effect of Concentration and Substrate

Pyrolytic carbon-silicon carbide (PyC-SiC) composite was produced by chemical vapor deposition (CVD) method. Trimethylsilyl chloride (TMSCl) was used as a source material to synthesize the composite. SiC and PyC arranged themselves next to each other by co-deposition method to form the composite. The formation of PyC-SiC composites and their morphology were followed by Raman spectroscopy and scanning electron microscopy, respectively. The effects of substrate type and TMSCl concentration on the microstructure and content of the composite were examined in this study. The results showed that TMSCl at 2.5%vol and graphite, as a substrate, were more suitable for the synthesis of composites with higher silicon carbide content (25% mole Si), minimum amorphous Si and lower defects in PyC crystals