Modeling of Capacitance and Sensitivity of a MEMS Pressure Sensor with Clamped Square Diaphragm
محل انتشار: ماهنامه بین المللی مهندسی، دوره: 26، شماره: 11
سال انتشار: 1392
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 741
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شناسه ملی سند علمی:
JR_IJE-26-11_014
تاریخ نمایه سازی: 17 خرداد 1393
چکیده مقاله:
In this paper, for the first time, the modeling of capacitance and sensitivity for MEMS capacitive pressure sensor with clamped square diaphragm is presented. In capacitive sensor the sensitivity isproportional to deflection and capacitance changes with pressure. Therefore, first the diaphragmdisplacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and thensimulated using finite element method (FEM). It can be seen that the analytical results agree withsimulation. The results also show that the high sensitivity can be achieved by decreasing the diaphragm thickness and increasing its size.
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نویسندگان
b.a ganji
Department of Electrical & Computer Engineering, Babol University of Technology, Babol, Iran
m shams nateri
Department of Electrical & Computer Engineering, Babol University of Technology, Babol, Iran