Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for CapacitiveAcoustic Sensors

In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has beenpresented. First, an analytical analyzes has been carried out to derive mathematic expressions formechanical sensitivity of diaphragm with residual stress. Next, by using Rayleigh's method we presentmathematical model to calculate the resonance frequency of corrugated diaphragm and investigate theeffect of residual stress, Young modulus and corrugation numbers on resonance frequency ofdiaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool forfinite element simulation have been used. The analytical and simulated results have been comparedtogether and there is good agreement between them.