Sol-gel Synthesis and Characterization of Barium Strontium Titanate Thin Films

Barium strontium titanate Ba1-xSrxTiO3 (BST) thin films have been prepared by sol–gel technique using barium acetate (Ba(CH3COO)2), strontium acetate (Sr(CH3COO)2) and titanium isopropoxide (Ti(OC3H7)4) as starting materials. Acetic acid and 2- methoxy-ethanol were selected as solvents. BST films of different thickness were deposited layer by layer onto pre-cleaned platinized silicon (Si/Pt) substrates by spin coating. The films were characterized in terms of their crystalline structure (X-ray diffraction) and microstructure (field emission scanning electronmicroscopy). The results indicate that the BST coatings exhibit perovskite structure when annealed at 700 °C. The thicknesses of the BST thin films were measured by spectroscopic ellipsometry in the wavelength range of 200-800 nm at an incidence angle of 70°.

کلیدواژه ها:

Barium strontium titanate ، Thin film ، Microstructure ، Sol-gel process ، Spin-coating