Introducing a Novel Structure for Improving SnO2 Thin Filmfor Propane Detection

A new double layers structure was proposed to improve sensitivity of tinoxide thin films in propane atmosphere. Three different thickness (200 nm,250 nm and 300 nm) were deposited on glass substrates (~ 20 mm  25mm  2 mm) using electron beam evaporation and annealed at fourdifferent temperatures. Propane (C3H8) sensing of all prepared samplesover a temperature range of 100°C to 400°C was investigated to achievethe optimum condition for gas sensing. The structure with 250 nmthickness which was annealed at 400°C showed the highest sensitivity of26% at an operating temperature of 315°C. The second layer with 60 nmthickness was deposited on this film to make 250/60 nm structure. Thisnew structure enhanced the sensitivity of the sample to 68% at a loweroptimum working temperature of 280°C. The morphology of the sampleswas characterized by atomic force microscopy (AFM) image.

کلیدواژه ها:

Thin film sensor ، Tin oxide ، Propane sensor