Design and Implementation of a Digital Analyzer for MEMS Hydrogen Concentration Sensor

In this paper, novel methods for designing and implementing analogue and digital hardware and software for detecting hydrogen concentration are presented. In the proposed software, by using the benefits of MEMS thermal conductivity sensors, we could calculate hydrogen - air mixture conductivity and consequently measure concentration with using relations between heating power loss and temperature difference between sensor and environment. The experimental results show that the maximum accuracy error in estimating purity is about 0.2%.

کلیدواژه ها:

Hydrogen Concentration Measurement ، Thermal Conductivity ، MEMS ، RTD