Fabrication and investigation of ZnO resistive nanosensor for detection of CO and CH4 gases

In this study, Zn thin films were deposited on a quartz substrate by DC magnetron sputtering. Then, ZnOnanoparticles were synthesized by heating the Zn thin films in the air at 700 °C for 1 hour. The structuralproperties of ZnO nanostructured layers were studied by XRD spectroscopy, FESEM and EDX images. Thesestudies showed that the nanosized ZnO particles have a porous structure and a vorticity structure. Also, theyare uniformly distributed on the surface. These features can greatly improve the sensing properties of ZnOsensors. Sensor experiments for different concentrations of methane and carbon monoxide were studied at300 ° C. Experiments indicated that the sensitivity of the ZnO nanosensor to CH4 and CO gases in camparewith similar ZnO sensors was significantly improved. Therefore, it can be claimed that nanosized particlesize ZnO thin films have improved the sensing properties of ZnO layers in order to detecting CH4 and COgases. Moreover, gas nanosensors can be produced by optimizing the manufacturing conditions of this sensor,which can detect very small amounts of CH4 and CO gases with very high sensitivity and stability in theshortest time.

کلیدواژه ها:

Nanosensor ، nanoparticles ، Zinc Oxide ، Methane ، Crbon Monoxide