Raisee - Department of Mechanical Engineering, University of Tehran
Vahedi - Department of Mechanical Engineering, University of Tehran

Rarefied gas flows in channels, pipes, and ducts with smooth surfaces are studied in a wide range of Knudsen number (Kn) at low Mach number (M) with the objective of developing simple, physics-based models. Such flows are encountered in microelectromechanical systems (MEMS), in nanotechnology applications, in micro and nano gas filteration and in low-pressure environments such as vacuum industry. For the flows with 0.01

rarefied gas flows, Knudsen number, slip flow, backward-facing step