Optical properties of diamond-like carbon nano-film deposited by RF- PECVD
عنوان مقاله: Optical properties of diamond-like carbon nano-film deposited by RF- PECVD
شناسه ملی مقاله: MINMETALCONF01_074
منتشر شده در کنفرانس بین المللی مهندسی معدن، فلزات و مواد در سال 1394
شناسه ملی مقاله: MINMETALCONF01_074
منتشر شده در کنفرانس بین المللی مهندسی معدن، فلزات و مواد در سال 1394
مشخصات نویسندگان مقاله:
Esmaeil Karami - M.Sc. of Materials Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
Akbar Eshaghi - Faculty of Materials Science and Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
Vahid Mohtadi - M.Sc. of Materials Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
خلاصه مقاله:
Esmaeil Karami - M.Sc. of Materials Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
Akbar Eshaghi - Faculty of Materials Science and Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
Vahid Mohtadi - M.Sc. of Materials Engineering, Maleke Ashtar University of Technology, Shahinshahr, Esfahan, Iran
Diamond-like carbon (DLC) nano-films were deposited on glass substrates by RadioFrequency Plasma Enhanced Chemical Vapor Deposition method (RF-PECVD) usingmethane (CH4) and hydrogen (H2) gases. X-ray diffraction (XRD) and Raman spectroscopywere used to characterize the structure of the DLC films. The optical properties of theDLC films were investigated by UV-VIS-NIR spectrophotometer and ellipsometer. Inamorphous carbons ID/IG is a measure of the size of the sp2 phase organized in rings. IfID/IG is negligible, then the sp2 phase is mainly organized in chains, or, even if rings arepresent, the bonds are not fully delocalized on the rings. XRD showed that the DLCfilm included amorphous structure and the raman spectroscopy showed that the ratio ofthe D and G peaks (ID/IG) is negligible (0.87). this was confirmed by XRD results. Theoptical results indicated that refractive index and band gap of the DLC thin film were 1.9and 1.45 eV, respectively.
کلمات کلیدی: DLC, PECVD, Nano-film, Optical properties
صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/540114/