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گواهی نمایه سازی مقاله Study on Effects of Hydrocarbonic Gases on Growth of Carbon Nanotubes by TCVD

عنوان مقاله: Study on Effects of Hydrocarbonic Gases on Growth of Carbon Nanotubes by TCVD
شناسه (COI) مقاله: NAYRC01_070
منتشر شده در همایش ملی نانو مواد و نانو تکنولوژی در سال ۱۳۸۸
مشخصات نویسندگان مقاله:

S Shahgaldi - Chemical faculty, Islamic Azad University,Tehran North Branch
Sh Moradi - Chemical faculty, Islamic Azad University,Tehran North Branch
M Ghorannevis - Research Center of Plasma Physics, Islamic Azad University
M Noori - Chemical faculty, Islamic Azad University,Tehran North Branch

خلاصه مقاله:
We investigated different hydrocarbonic gases such as Acetylene, Carbon Monoxide and Methane on synthesized of carbon nanotubes. Except hydrocarbonic gases, all the chemical vapor deposition (CVD) process parameters such as substrate, nano thin films of metal which was coated on substrate, flow rate of reactant gases, temperature, time and diluted gases are constant. Carbon nanotubes (CNTs) were synthesized on glass substrate coated with iron, aluminum and copper by thermal chemical vapor deposition using acetylene and hydrogen as the reaction gases in atmospheric pressure. The flow rate ratio of acetylene to hydrogen is 1/5. They were investigated by atomic force microscope (AFM), Scanning electron microscope (SEM) and Raman Spectroscopy.

کلمات کلیدی:
DC magnetron sputtering, TCVD, Nanotube, Glass substrate

صفحه اختصاصی مقاله و دریافت فایل کامل: https://www.civilica.com/Paper-NAYRC01-NAYRC01_070.html