Amir Hoshang Ramezani - Department of Physics, West Tehran Branch, Islamic Azad University, Tehran, Iran
Maryam Habibi - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran
Mahmood Ghoranneviss - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

In this research, for the first time, we synthesizemagnesium nitride thin films on 304-type stainless steelsubstrates using a Mather-type (2 kJ) plasma focus (PF)device. The films of magnesium nitride are coated withdifferent number of focus shots (like 15, 25 and 35) at adistance of 8 cm from the anode tip and at 0 angularposition with respect to the anode axis. For investigation ofthe structural properties and surface morphology of magnesiumnitride films, we utilized the X-ray diffractometer(XRD), atomic force microscopy (AFM) and scanningelectron microscopy (SEM) analysis, respectively. Also,the elemental composition is characterized by energy-dispersiveX-ray (EDX) analysis. Furthermore, Vicker’s microhardnessis used to study the mechanical properties ofthe deposited films. The results show that the degree ofcrystallinity of deposited thin films (from XRD), theaverage size of particles and surface roughness (fromAFM), crystalline growth of structures (from SEM) and thehardness values of the films depend on the number of focusshots. The EDX analysis demonstrates the existence of theelemental composition of magnesium in the depositedsamples.Keywords

PF device Magnesium nitride Thin film Nanostructure Morphology