Characterization of argon/air atmospheric pressure capacitively coupled radio frequency dielectric barrier discharge regarding parasitic capacitor at 13.56 MHz

In this paper, uniform argon glow discharge at atmospheric pressure in a diffuse mode driven by a 300-W radiofrequency(13.56 MHz) power supply based on dielectric barrier discharge was investigated. In this work, the effectof the parasitic capacitor on the electrical characteristics of the capacitively coupled atmospheric pressure plasmawas investigated. It was revealed that more than half of the RF current is parasitic in our system as a characteristicof the capacitively coupled plasma. It was also proved that the discharge resistance and sheath capacitanceincrease at higher input powers while the impedance decreases. In order to recognize plasma, optical emissionspectroscopy apparatus was used. Argon, oxygen, copper, and nitrogen spectrum lines were diagnosed. The plasmagas temperature and electronic excitation temperature were investigated showing a non-equilibrium discharge.