Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm

external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is ۴۵ mV, and the maximum output of MEMS microphone is ۱.۱۲۵ µV.

کلیدواژه ها:

MEMS ، Microphone ، Lateral slots ، Diaphragm stiffness