Robust Trajectory Tracking Control for a MEMS Vibratory Gyroscope with a Finite Convergence Time

In this paper, a robust finite time tracking problem isstudied for a z-axis MEMS vibratory gyroscope subjectedto bounded disturbances and parameter uncertainties. Byusing the nonsingular terminal sliding mode controlmethod, external control forces are designed to steerdisplacements of the MEMS gyroscope to desiredtrajectories within a total adjustable finite time. Moreover,the Lyapunov theorem is applied to prove the global finitetime stability of the closed-loop MEMS gyro system. Also,a new formula is extracted to determine the upper bound ofthe required total finite time. Finally, a numerical exampleis provided to show the effectiveness of the proposedcontrol scheme.